Polygon-based unified Fourier-modal approach for diffractive optics simulations
K. V. Nikolaev, V. Soltwisch, M. A. Botchev, A. Fernández Herrero, P. Hönicke, F. Scholze, S. N. Yakunin
Published: 2024/10/18
Abstract
In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the new approach against other computational theories and a synchrotron scattering experiment.